au.\*:("YONEZAWA, Toshihiro")
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Copper electrodeposition of high-aspect-ratio vias for three dimensional packagingKONDO, Kazuo; YONEZAWA, Toshihiro; TOMISAKA, Manabu et al.Proceedings - Electrochemical Society. 2003, pp 28-32, issn 0161-6374, isbn 1-56677-390-3, 5 p.Conference Paper